Scatterometry for optimization of injection molded nanostructures at the fabrication line

Jonas Skovlund Madsen; Soren Alkaersig Jensen; Lars Nakotte; Arne Vogelsang; Lasse Hojlund Thamdrup; Ilja Czolkos; Alicia Johansson; Jorgen Garnaes; Theodor Nielsen; Jesper Nygard; Poul Erik Hansen

doi:10.1007/s00170-018-2665-7

Scatterometry for optimization of injection molded nanostructures at the fabrication line

Jonas Skovlund Madsen, Soren Alkaersig Jensen, Lars Nakotte, Arne Vogelsang, Lasse Hojlund Thamdrup, Ilja Czolkos, Alicia Johansson, Jorgen Garnaes, Theodor Nielsen, Jesper Nygard, Poul Erik Hansen

Condensed Matter Physics

5 Citations (Scopus)

Original language	English
Journal	International Journal of Advanced Manufacturing Technology
Volume	99
Issue number	9-12, SI
Pages (from-to)	2669-2676
Number of pages	8
ISSN	0268-3768
DOIs	https://doi.org/10.1007/s00170-018-2665-7
Publication status	Published - 1 Dec 2018

Keywords

Scatterometry
Injection molding
Nanostructures
Metrology
Process control

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10.1007/s00170-018-2665-7

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Madsen, J. S., Jensen, S. A., Nakotte, L., Vogelsang, A., Thamdrup, L. H., Czolkos, I., Johansson, A., Garnaes, J., Nielsen, T., Nygard, J., & Hansen, P. E. (2018). Scatterometry for optimization of injection molded nanostructures at the fabrication line. International Journal of Advanced Manufacturing Technology, 99(9-12, SI), 2669-2676. https://doi.org/10.1007/s00170-018-2665-7

Madsen, JS, Jensen, SA, Nakotte, L, Vogelsang, A, Thamdrup, LH, Czolkos, I, Johansson, A, Garnaes, J, Nielsen, T, Nygard, J & Hansen, PE 2018, 'Scatterometry for optimization of injection molded nanostructures at the fabrication line', International Journal of Advanced Manufacturing Technology, vol. 99, no. 9-12, SI, pp. 2669-2676. https://doi.org/10.1007/s00170-018-2665-7

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author = "Madsen, {Jonas Skovlund} and Jensen, {Soren Alkaersig} and Lars Nakotte and Arne Vogelsang and Thamdrup, {Lasse Hojlund} and Ilja Czolkos and Alicia Johansson and Jorgen Garnaes and Theodor Nielsen and Jesper Nygard and Hansen, {Poul Erik}",

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T1 - Scatterometry for optimization of injection molded nanostructures at the fabrication line

AU - Madsen, Jonas Skovlund

AU - Jensen, Soren Alkaersig

AU - Nakotte, Lars

AU - Vogelsang, Arne

AU - Thamdrup, Lasse Hojlund

AU - Czolkos, Ilja

AU - Johansson, Alicia

AU - Garnaes, Jorgen

AU - Nielsen, Theodor

AU - Nygard, Jesper

AU - Hansen, Poul Erik

N1 - [Qdev]

PY - 2018/12/1

Y1 - 2018/12/1

KW - Scatterometry

KW - Injection molding

KW - Nanostructures

KW - Metrology

KW - Process control

U2 - 10.1007/s00170-018-2665-7

DO - 10.1007/s00170-018-2665-7

M3 - Journal article

SN - 0268-3768

VL - 99

SP - 2669

EP - 2676

JO - International Journal of Advanced Manufacturing Technology

JF - International Journal of Advanced Manufacturing Technology

IS - 9-12, SI

ER -

Scatterometry for optimization of injection molded nanostructures at the fabrication line

Keywords

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