Scatterometry for optimization of injection molded nanostructures at the fabrication line

Jonas Skovlund Madsen; Soren Alkaersig Jensen; Lars Nakotte; Arne Vogelsang; Lasse Hojlund Thamdrup; Ilja Czolkos; Alicia Johansson; Jorgen Garnaes; Theodor Nielsen; Jesper Nygard; Poul Erik Hansen

doi:10.1007/s00170-018-2665-7

Scatterometry for optimization of injection molded nanostructures at the fabrication line

Jonas Skovlund Madsen, Soren Alkaersig Jensen, Lars Nakotte, Arne Vogelsang, Lasse Hojlund Thamdrup, Ilja Czolkos, Alicia Johansson, Jorgen Garnaes, Theodor Nielsen, Jesper Nygard, Poul Erik Hansen

Faststoffysik

5 Citationer (Scopus)

Originalsprog	Engelsk
Tidsskrift	International Journal of Advanced Manufacturing Technology
Vol/bind	99
Udgave nummer	9-12, SI
Sider (fra-til)	2669-2676
Antal sider	8
ISSN	0268-3768
DOI	https://doi.org/10.1007/s00170-018-2665-7
Status	Udgivet - 1 dec. 2018

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10.1007/s00170-018-2665-7

Citationsformater

Madsen, J. S., Jensen, S. A., Nakotte, L., Vogelsang, A., Thamdrup, L. H., Czolkos, I., Johansson, A., Garnaes, J., Nielsen, T., Nygard, J., & Hansen, P. E. (2018). Scatterometry for optimization of injection molded nanostructures at the fabrication line. International Journal of Advanced Manufacturing Technology, 99(9-12, SI), 2669-2676. https://doi.org/10.1007/s00170-018-2665-7

Madsen, JS, Jensen, SA, Nakotte, L, Vogelsang, A, Thamdrup, LH, Czolkos, I, Johansson, A, Garnaes, J, Nielsen, T, Nygard, J & Hansen, PE 2018, 'Scatterometry for optimization of injection molded nanostructures at the fabrication line', International Journal of Advanced Manufacturing Technology, bind 99, nr. 9-12, SI, s. 2669-2676. https://doi.org/10.1007/s00170-018-2665-7

@article{ef00cf63e72144f5b9c6b9a396d80329,

title = "Scatterometry for optimization of injection molded nanostructures at the fabrication line",

keywords = "Scatterometry, Injection molding, Nanostructures, Metrology, Process control",

author = "Madsen, {Jonas Skovlund} and Jensen, {Soren Alkaersig} and Lars Nakotte and Arne Vogelsang and Thamdrup, {Lasse Hojlund} and Ilja Czolkos and Alicia Johansson and Jorgen Garnaes and Theodor Nielsen and Jesper Nygard and Hansen, {Poul Erik}",

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TY - JOUR

T1 - Scatterometry for optimization of injection molded nanostructures at the fabrication line

AU - Madsen, Jonas Skovlund

AU - Jensen, Soren Alkaersig

AU - Nakotte, Lars

AU - Vogelsang, Arne

AU - Thamdrup, Lasse Hojlund

AU - Czolkos, Ilja

AU - Johansson, Alicia

AU - Garnaes, Jorgen

AU - Nielsen, Theodor

AU - Nygard, Jesper

AU - Hansen, Poul Erik

N1 - [Qdev]

PY - 2018/12/1

Y1 - 2018/12/1

KW - Scatterometry

KW - Injection molding

KW - Nanostructures

KW - Metrology

KW - Process control

U2 - 10.1007/s00170-018-2665-7

DO - 10.1007/s00170-018-2665-7

M3 - Journal article

SN - 0268-3768

VL - 99

SP - 2669

EP - 2676

JO - International Journal of Advanced Manufacturing Technology

JF - International Journal of Advanced Manufacturing Technology

IS - 9-12, SI

ER -

Scatterometry for optimization of injection molded nanostructures at the fabrication line

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