@article{9ff417ba22dc4a2ab124c15000db70b0,
title = "In-line characterization of nanostructured mass-produced polymer components using scatterometry",
keywords = "scatterometry, injection molding, metrology, in-line characterization",
author = "Madsen, {Jonas Skovlund} and Thamdrup, {Lasse Hojlund} and Ilja Czolkos and Hansen, {Poul Erik} and Alicia Johansson and Jorgen Garnaes and Jesper Nygard and Madsen, {Morten Hannibal}",
note = "[Qdev]",
year = "2017",
month = jul,
day = "20",
doi = "10.1088/1361-6439/aa7a3a",
language = "English",
volume = "27",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
publisher = "Institute of Physics Publishing Ltd",
number = "8",
}