In-line characterization of nanostructured mass-produced polymer components using scatterometry

Jonas Skovlund Madsen; Lasse Hojlund Thamdrup; Ilja Czolkos; Poul Erik Hansen; Alicia Johansson; Jorgen Garnaes; Jesper Nygard; Morten Hannibal Madsen

doi:10.1088/1361-6439/aa7a3a

In-line characterization of nanostructured mass-produced polymer components using scatterometry

Jonas Skovlund Madsen, Lasse Hojlund Thamdrup, Ilja Czolkos, Poul Erik Hansen, Alicia Johansson, Jorgen Garnaes, Jesper Nygard, Morten Hannibal Madsen

Faststoffysik

8 Citationer (Scopus)

Originalsprog	Engelsk
Artikelnummer	085004
Tidsskrift	Journal of Micromechanics and Microengineering
Vol/bind	27
Udgave nummer	8
ISSN	0960-1317
DOI	https://doi.org/10.1088/1361-6439/aa7a3a
Status	Udgivet - 20 jul. 2017

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10.1088/1361-6439/aa7a3a

Madsen_2017_J._Micromech._Microeng._27_085004Forlagets udgivne version, 1,01 MB

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title = "In-line characterization of nanostructured mass-produced polymer components using scatterometry",

keywords = "scatterometry, injection molding, metrology, in-line characterization",

author = "Madsen, {Jonas Skovlund} and Thamdrup, {Lasse Hojlund} and Ilja Czolkos and Hansen, {Poul Erik} and Alicia Johansson and Jorgen Garnaes and Jesper Nygard and Madsen, {Morten Hannibal}",

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TY - JOUR

T1 - In-line characterization of nanostructured mass-produced polymer components using scatterometry

AU - Madsen, Jonas Skovlund

AU - Thamdrup, Lasse Hojlund

AU - Czolkos, Ilja

AU - Hansen, Poul Erik

AU - Johansson, Alicia

AU - Garnaes, Jorgen

AU - Nygard, Jesper

AU - Madsen, Morten Hannibal

N1 - [Qdev]

PY - 2017/7/20

Y1 - 2017/7/20

KW - scatterometry

KW - injection molding

KW - metrology

KW - in-line characterization

U2 - 10.1088/1361-6439/aa7a3a

DO - 10.1088/1361-6439/aa7a3a

M3 - Journal article

SN - 0960-1317

VL - 27

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 8

M1 - 085004

ER -

In-line characterization of nanostructured mass-produced polymer components using scatterometry

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