Replacing libraries in scatterometry

Jonas Skovlund Moller Madsen; Soren Alkaersig Jensen; Jesper Nygard; Poul Erik Hansen

doi:10.1364/OE.26.034622

Replacing libraries in scatterometry

Jonas Skovlund Moller Madsen, Soren Alkaersig Jensen, Jesper Nygard, Poul Erik Hansen

Faststoffysik

3 Citationer (Scopus)

64 Downloads (Pure)

Originalsprog	Engelsk
Tidsskrift	Optics Express
Vol/bind	26
Udgave nummer	26
Sider (fra-til)	34622-34632
Antal sider	11
ISSN	1094-4087
DOI	https://doi.org/10.1364/OE.26.034622
Status	Udgivet - 24 dec. 2018

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10.1364/OE.26.034622

oe-26-26-34622Forlagets udgivne version, 2,25 MBLicens: CC BY

Citationsformater

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title = "Replacing libraries in scatterometry",

author = "Madsen, {Jonas Skovlund Moller} and Jensen, {Soren Alkaersig} and Jesper Nygard and Hansen, {Poul Erik}",

note = "[Qdev]",

year = "2018",

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doi = "10.1364/OE.26.034622",

language = "English",

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pages = "34622--34632",

journal = "Optics Express",

issn = "1094-4087",

publisher = "The Optical Society",

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TY - JOUR

T1 - Replacing libraries in scatterometry

AU - Madsen, Jonas Skovlund Moller

AU - Jensen, Soren Alkaersig

AU - Nygard, Jesper

AU - Hansen, Poul Erik

N1 - [Qdev]

PY - 2018/12/24

Y1 - 2018/12/24

U2 - 10.1364/OE.26.034622

DO - 10.1364/OE.26.034622

M3 - Journal article

C2 - 30650883

SN - 1094-4087

VL - 26

SP - 34622

EP - 34632

JO - Optics Express

JF - Optics Express

IS - 26

ER -

Replacing libraries in scatterometry

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