Replacing libraries in scatterometry

Jonas Skovlund Moller Madsen; Soren Alkaersig Jensen; Jesper Nygard; Poul Erik Hansen

doi:10.1364/OE.26.034622

Replacing libraries in scatterometry

Jonas Skovlund Moller Madsen, Soren Alkaersig Jensen, Jesper Nygard, Poul Erik Hansen

Condensed Matter Physics

3 Citations (Scopus)

64 Downloads (Pure)

Original language	English
Journal	Optics Express
Volume	26
Issue number	26
Pages (from-to)	34622-34632
Number of pages	11
ISSN	1094-4087
DOIs	https://doi.org/10.1364/OE.26.034622
Publication status	Published - 24 Dec 2018

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oe-26-26-34622Final published version, 2.25 MBLicence: CC BY

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title = "Replacing libraries in scatterometry",

author = "Madsen, {Jonas Skovlund Moller} and Jensen, {Soren Alkaersig} and Jesper Nygard and Hansen, {Poul Erik}",

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year = "2018",

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journal = "Optics Express",

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T1 - Replacing libraries in scatterometry

AU - Madsen, Jonas Skovlund Moller

AU - Jensen, Soren Alkaersig

AU - Nygard, Jesper

AU - Hansen, Poul Erik

N1 - [Qdev]

PY - 2018/12/24

Y1 - 2018/12/24

U2 - 10.1364/OE.26.034622

DO - 10.1364/OE.26.034622

M3 - Journal article

C2 - 30650883

SN - 1094-4087

VL - 26

SP - 34622

EP - 34632

JO - Optics Express

JF - Optics Express

IS - 26

ER -

Replacing libraries in scatterometry

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