TY - JOUR
T1 - Fast Strain Mapping of Nanowire Light-Emitting Diodes Using Nanofocused X-ray Beams.
AU - Stankevic, Tomas
AU - Hilner, Emelie Kristin Margareta
AU - Seiboth, F.
AU - Ciechonski, Rafal
AU - Vescovi, Giuliano
AU - Kryliouk, Olga
AU - Johansson, Ulf
AU - Samuelsen, Lars
AU - Wellenreuther, Gred
AU - Falkenberg, Gerald
AU - Feidenhans'l, Robert Krarup
AU - Mikkelsen, Anders
PY - 2015/7/28
Y1 - 2015/7/28
N2 - X-ray nanobeams are unique nondestructive probes that allow direct measurements of the nanoscale strain distribution and composition inside the micrometer thick layered structures that are found in most electronic device architectures. However, the method is usually extremely time-consuming, and as a result, data sets are often constrained to a few or even single objects. Here we demonstrate that by special design of a nanofocused X-ray beam diffraction experiment we can (in a single 2D scan with no sample rotation) measure the individual strain and composition profiles of many structures in an array of upright standing nanowires. We make use of the observation that in the generic nanowire device configuration, which is found in high-speed transistors, solar cells, and light-emitting diodes, each wire exhibits very small degrees of random tilts and twists toward the substrate. Although the tilt and twist are very small, they give a new contrast mechanism between different wires. In the present case, we image complex nanowires for nanoLED fabrication and compare to theoretical simulations, demonstrating that this fast method is suitable for real nanostructured devices.
AB - X-ray nanobeams are unique nondestructive probes that allow direct measurements of the nanoscale strain distribution and composition inside the micrometer thick layered structures that are found in most electronic device architectures. However, the method is usually extremely time-consuming, and as a result, data sets are often constrained to a few or even single objects. Here we demonstrate that by special design of a nanofocused X-ray beam diffraction experiment we can (in a single 2D scan with no sample rotation) measure the individual strain and composition profiles of many structures in an array of upright standing nanowires. We make use of the observation that in the generic nanowire device configuration, which is found in high-speed transistors, solar cells, and light-emitting diodes, each wire exhibits very small degrees of random tilts and twists toward the substrate. Although the tilt and twist are very small, they give a new contrast mechanism between different wires. In the present case, we image complex nanowires for nanoLED fabrication and compare to theoretical simulations, demonstrating that this fast method is suitable for real nanostructured devices.
U2 - 10.1021/acsnano.5b01291
DO - 10.1021/acsnano.5b01291
M3 - Journal article
C2 - 26090689
SN - 1936-0851
VL - 9
SP - 6978
EP - 6984
JO - A C S Nano
JF - A C S Nano
IS - 7
ER -