Ultraviolet transparent silicon oxynitride waveguides for biochemical microsystems

Klaus B. Mogensen; Peter Friis; Jörg Hübner; Nickolaj Jacob Petersen; Anders M. Jørgensen; Pieter Telleman; Jörg P. Kutter

doi:10.1364/OL.26.000716

Ultraviolet transparent silicon oxynitride waveguides for biochemical microsystems

Klaus B. Mogensen, Peter Friis, Jörg Hübner, Nickolaj Jacob Petersen, Anders M. Jørgensen, Pieter Telleman, Jörg P. Kutter

36 Citations (Scopus)

Abstract

Udgivelsesdato: May 15

Original language	English
Journal	Optics Letters
Volume	26
Issue number	10
Pages (from-to)	716-718
ISSN	0146-9592
DOIs	https://doi.org/10.1364/OL.26.000716
Publication status	Published - 2001
Externally published	Yes

Access to Document

10.1364/OL.26.000716

Cite this

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title = "Ultraviolet transparent silicon oxynitride waveguides for biochemical microsystems",

abstract = "Udgivelsesdato: May 15",

author = "{B. Mogensen}, Klaus and Peter Friis and J{\"o}rg H{\"u}bner and Petersen, {Nickolaj Jacob} and {M. J{\o}rgensen}, Anders and Pieter Telleman and {P. Kutter}, J{\"o}rg",

year = "2001",

doi = "10.1364/OL.26.000716",

language = "English",

volume = "26",

pages = "716--718",

journal = "Optics Letters",

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publisher = "Optical Society of America",

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T1 - Ultraviolet transparent silicon oxynitride waveguides for biochemical microsystems

AU - B. Mogensen, Klaus

AU - Friis, Peter

AU - Hübner, Jörg

AU - Petersen, Nickolaj Jacob

AU - M. Jørgensen, Anders

AU - Telleman, Pieter

AU - P. Kutter, Jörg

PY - 2001

Y1 - 2001

N2 - Udgivelsesdato: May 15

AB - Udgivelsesdato: May 15

U2 - 10.1364/OL.26.000716

DO - 10.1364/OL.26.000716

M3 - Journal article

SN - 0146-9592

VL - 26

SP - 716

EP - 718

JO - Optics Letters

JF - Optics Letters

IS - 10

ER -