@article{d0a79ce137a3419b80f0d6fb776ad3a0,
title = "Soft-mask fabrication of gallium arsenide nanomembranes for integrated quantum photonics",
keywords = "nanofabrication, plasma etching, photonic crystals, III-V semiconconductors, quantum photonics, integrated optical circuits",
author = "L. Midolo and T. Pregnolato and G. Kirsanske and S. Stobbe",
year = "2015",
month = nov,
day = "11",
doi = "10.1088/0957-4484/26/48/484002",
language = "English",
volume = "26",
journal = "Nanotechnology",
issn = "0957-4484",
publisher = "Institute of Physics Publishing Ltd",
number = "48",
}