Single-layer graphene on silicon nitride micromembrane resonators

Silvan Schmid; Tolga Bagci; Emil Zeuthen; Jacob M. Taylor; Patrick K. Herring; Maja C. Cassidy; Luis G. Villanueva; Bartolo Amato; Anja Boisen; Yong Cheol Shin; Jing Kong; Anders Søndberg Sørensen; Koji Usami; Eugene Simon Polzik

Single-layer graphene on silicon nitride micromembrane resonators

Silvan Schmid, Tolga Bagci, Emil Zeuthen, Jacob M. Taylor, Patrick K. Herring, Maja C. Cassidy, Luis G. Villanueva, Bartolo Amato, Anja Boisen, Yong Cheol Shin, Jing Kong, Anders Søndberg Sørensen, Koji Usami, Eugene Simon Polzik

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Abstract

Due to their low mass, high quality factor, and good optical properties, silicon nitride (SiN) micromembrane resonators are widely used in force and mass sensing applications, particularly in optomechanics. The metallization of such membranes would enable an electronic integration with the prospect for exciting new devices, such as optoelectromechanical transducers. Here, we add a single-layer graphene on SiN micromembranes and compare electromechanical coupling and mechanical properties to bare dielectric membranes and to membranes metallized with an aluminium layer. The electrostatic coupling of graphene covered membranes is found to be equal to a perfectly conductive membrane, without significantly adding mass, decreasing the superior mechanical quality factor or affecting the optical properties of pure SiN micromembranes. The concept of graphene-SiN resonators allows a broad range of new experiments both in applied physics and fundamental basic research, e.g., for the mechanical, electrical, or optical characterization of graphene.

Original language	English
Article number	054513
Journal	Journal of Applied Physics
Volume	115
Issue number	5
ISSN	0021-8979
Publication status	Published - 7 Feb 2014

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http://dx.doi.org/10.1063/1.4862296

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title = "Single-layer graphene on silicon nitride micromembrane resonators",

abstract = "Due to their low mass, high quality factor, and good optical properties, silicon nitride (SiN) micromembrane resonators are widely used in force and mass sensing applications, particularly in optomechanics. The metallization of such membranes would enable an electronic integration with the prospect for exciting new devices, such as optoelectromechanical transducers. Here, we add a single-layer graphene on SiN micromembranes and compare electromechanical coupling and mechanical properties to bare dielectric membranes and to membranes metallized with an aluminium layer. The electrostatic coupling of graphene covered membranes is found to be equal to a perfectly conductive membrane, without significantly adding mass, decreasing the superior mechanical quality factor or affecting the optical properties of pure SiN micromembranes. The concept of graphene-SiN resonators allows a broad range of new experiments both in applied physics and fundamental basic research, e.g., for the mechanical, electrical, or optical characterization of graphene.",

author = "Silvan Schmid and Tolga Bagci and Emil Zeuthen and Taylor, {Jacob M.} and Herring, {Patrick K.} and Cassidy, {Maja C.} and Villanueva, {Luis G.} and Bartolo Amato and Anja Boisen and Shin, {Yong Cheol} and Jing Kong and S{\o}rensen, {Anders S{\o}ndberg} and Koji Usami and Polzik, {Eugene Simon}",

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language = "English",

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journal = "Journal of Applied Physics",

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T1 - Single-layer graphene on silicon nitride micromembrane resonators

AU - Schmid, Silvan

AU - Bagci, Tolga

AU - Zeuthen, Emil

AU - Taylor, Jacob M.

AU - Herring, Patrick K.

AU - Cassidy, Maja C.

AU - Villanueva, Luis G.

AU - Amato, Bartolo

AU - Boisen, Anja

AU - Shin, Yong Cheol

AU - Kong, Jing

AU - Sørensen, Anders Søndberg

AU - Usami, Koji

AU - Polzik, Eugene Simon

PY - 2014/2/7

Y1 - 2014/2/7

N2 - Due to their low mass, high quality factor, and good optical properties, silicon nitride (SiN) micromembrane resonators are widely used in force and mass sensing applications, particularly in optomechanics. The metallization of such membranes would enable an electronic integration with the prospect for exciting new devices, such as optoelectromechanical transducers. Here, we add a single-layer graphene on SiN micromembranes and compare electromechanical coupling and mechanical properties to bare dielectric membranes and to membranes metallized with an aluminium layer. The electrostatic coupling of graphene covered membranes is found to be equal to a perfectly conductive membrane, without significantly adding mass, decreasing the superior mechanical quality factor or affecting the optical properties of pure SiN micromembranes. The concept of graphene-SiN resonators allows a broad range of new experiments both in applied physics and fundamental basic research, e.g., for the mechanical, electrical, or optical characterization of graphene.

AB - Due to their low mass, high quality factor, and good optical properties, silicon nitride (SiN) micromembrane resonators are widely used in force and mass sensing applications, particularly in optomechanics. The metallization of such membranes would enable an electronic integration with the prospect for exciting new devices, such as optoelectromechanical transducers. Here, we add a single-layer graphene on SiN micromembranes and compare electromechanical coupling and mechanical properties to bare dielectric membranes and to membranes metallized with an aluminium layer. The electrostatic coupling of graphene covered membranes is found to be equal to a perfectly conductive membrane, without significantly adding mass, decreasing the superior mechanical quality factor or affecting the optical properties of pure SiN micromembranes. The concept of graphene-SiN resonators allows a broad range of new experiments both in applied physics and fundamental basic research, e.g., for the mechanical, electrical, or optical characterization of graphene.

M3 - Journal article

SN - 0021-8979

VL - 115

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 5

M1 - 054513

ER -

Single-layer graphene on silicon nitride micromembrane resonators

Abstract

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