| Original language | English |
|---|---|
| Journal | Journal of Vacuum Science & Technology A |
| Issue number | 19 (4) |
| Pages (from-to) | 1421-1424 |
| Publication status | Published - 2001 |
Laterally graded multilayers and their applications
Jens Als-Nielsen, Chian Liu, A. Macrander, K. Zhang
19
Citations
(Scopus)