Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology

Zarko Zobenica; Rob W. van der Heijden; Maurangelo Petruzzella; Francesco Pagliano; Rick Leijssen; Tian Xia; Leonardo Midolo; Michele Cotrufo; YongJin Cho; Frank W. M. van Otten; Ewold Verhagen; Andrea Fiore

doi:10.1038/s41467-017-02392-5

Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology

Zarko Zobenica, Rob W. van der Heijden, Maurangelo Petruzzella, Francesco Pagliano, Rick Leijssen, Tian Xia, Leonardo Midolo, Michele Cotrufo, YongJin Cho, Frank W. M. van Otten, Ewold Verhagen, Andrea Fiore

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Original language	English
Article number	2216
Journal	Nature Communications
Volume	8
ISSN	2041-1723
DOIs	https://doi.org/10.1038/s41467-017-02392-5
Publication status	Published - 1 Dec 2017

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s41467-017-02392-5Final published version, 1.01 MB

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title = "Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology",

author = "Zarko Zobenica and {van der Heijden}, {Rob W.} and Maurangelo Petruzzella and Francesco Pagliano and Rick Leijssen and Tian Xia and Leonardo Midolo and Michele Cotrufo and YongJin Cho and {van Otten}, {Frank W. M.} and Ewold Verhagen and Andrea Fiore",

year = "2017",

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doi = "10.1038/s41467-017-02392-5",

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T1 - Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology

AU - Zobenica, Zarko

AU - van der Heijden, Rob W.

AU - Petruzzella, Maurangelo

AU - Pagliano, Francesco

AU - Leijssen, Rick

AU - Xia, Tian

AU - Midolo, Leonardo

AU - Cotrufo, Michele

AU - Cho, YongJin

AU - van Otten, Frank W. M.

AU - Verhagen, Ewold

AU - Fiore, Andrea

PY - 2017/12/1

Y1 - 2017/12/1

U2 - 10.1038/s41467-017-02392-5

DO - 10.1038/s41467-017-02392-5

M3 - Journal article

C2 - 29263425

SN - 2041-1723

VL - 8

JO - Nature Communications

JF - Nature Communications

M1 - 2216

ER -

Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology

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