Scalable focused ion beam creation of nearly lifetime-limited single quantum emitters in diamond nanostructures

Tim Schroeder, Matthew E. Trusheim, Michael Walsh, Luozhou Li, Jiabao Zheng, Marco Schukraft, Alp Sipahigil, Ruffin E. Evans, Denis D. Sukachev, Christian T. Nguyen, Jose L. Pacheco, Ryan M. Camacho, Edward S. Bielejec, Mikhail D. Lukin, Dirk Englund