Atomic excitations in sputtering processes

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@article{3a4e500166724cd89a1fb3f29739d515,

title = "Atomic excitations in sputtering processes",

author = "Niels Andersen and Andresen, {Bjarne B{\o}geskov} and E. Veje",

year = "1982",

month = jun,

day = "12",

doi = "10.1080/00337578208242783",

language = "English",

volume = "60",

pages = "119--127",

journal = "Radiation Effects and Defects in Solids",

issn = "1042-0150",

publisher = "Taylor & Francis",

number = "1-4",

}

TY - JOUR

T1 - Atomic excitations in sputtering processes

AU - Andersen, Niels

AU - Andresen, Bjarne Bøgeskov

AU - Veje, E.

PY - 1982/6/12

Y1 - 1982/6/12

U2 - 10.1080/00337578208242783

DO - 10.1080/00337578208242783

M3 - Journal article

SN - 1042-0150

VL - 60

SP - 119

EP - 127

JO - Radiation Effects and Defects in Solids

JF - Radiation Effects and Defects in Solids

IS - 1-4

ER -