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Soft-mask fabrication of gallium arsenide nanomembranes for integrated quantum photonics
L. Midolo
, T. Pregnolato, G. Kirsanske, S. Stobbe
Quantop
20
Citations (Scopus)
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Engineering & Materials Science
Gallium arsenide
100%
Photonics
80%
Masks
66%
Plasma etching
52%
Fabrication
52%
Inductively coupled plasma
26%
Dry etching
25%
Wet etching
24%
Electron beams
20%
Etching
18%
Cleaning
16%
Integrated circuits
16%
Statistical methods
14%
Membranes
14%
Costs
6%
Chemical Compounds
Etching
63%
Inductively Coupled Plasma
17%
Plasma
10%
Time
6%