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Scatterometry for optimization of injection molded nanostructures at the fabrication line
Jonas Skovlund Madsen, Soren Alkaersig Jensen, Lars Nakotte, Arne Vogelsang, Lasse Hojlund Thamdrup, Ilja Czolkos, Alicia Johansson, Jorgen Garnaes, Theodor Nielsen, Jesper Nygard, Poul Erik Hansen