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Nanoscale patterning of electronic devices at the amorphous LaAlO3/SrTiO3 oxide interface using an electron sensitive polymer mask
Anders V. Bjorlig, Merlin von Soosten, Ricci Erlandsen, Rasmus Tindal Dahm, Yu Zhang, Yulin Gan, Yunzhong Chen, Nini Pryds, Thomas S. Jespersen