Nanoscale patterning of electronic devices at the amorphous LaAlO3/SrTiO3 oxide interface using an electron sensitive polymer mask

Anders V. Bjorlig; Merlin von Soosten; Ricci Erlandsen; Rasmus Tindal Dahm; Yu Zhang; Yulin Gan; Yunzhong Chen; Nini Pryds; Thomas S. Jespersen

doi:10.1063/1.5026362

Nanoscale patterning of electronic devices at the amorphous LaAlO3/SrTiO3 oxide interface using an electron sensitive polymer mask

Anders V. Bjorlig, Merlin von Soosten, Ricci Erlandsen, Rasmus Tindal Dahm, Yu Zhang, Yulin Gan, Yunzhong Chen, Nini Pryds, Thomas S. Jespersen

Condensed Matter Physics

5 Citations (Scopus)

Original language	English
Article number	171606
Journal	Applied Physics Letters
Volume	112
Issue number	17
ISSN	0003-6951
DOIs	https://doi.org/10.1063/1.5026362
Publication status	Published - 23 Apr 2018

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1.5026362Final published version, 1.92 MBLicence: CC BY

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title = "Nanoscale patterning of electronic devices at the amorphous LaAlO3/SrTiO3 oxide interface using an electron sensitive polymer mask",

author = "Bjorlig, {Anders V.} and {von Soosten}, Merlin and Ricci Erlandsen and Dahm, {Rasmus Tindal} and Yu Zhang and Yulin Gan and Yunzhong Chen and Nini Pryds and Jespersen, {Thomas S.}",

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AU - Bjorlig, Anders V.

AU - von Soosten, Merlin

AU - Erlandsen, Ricci

AU - Dahm, Rasmus Tindal

AU - Zhang, Yu

AU - Gan, Yulin

AU - Chen, Yunzhong

AU - Pryds, Nini

AU - Jespersen, Thomas S.

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VL - 112

JO - Applied Physics Letters

JF - Applied Physics Letters

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Nanoscale patterning of electronic devices at the amorphous LaAlO3/SrTiO3 oxide interface using an electron sensitive polymer mask

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