High-fluence ion implantation of In into Al crystals : formation and evolution of buried layers

V.S. Touboltsev, G. Dybkjær, A. Johansen, E. Johnson, Leif Sarholt-Kristensen, H.H. Andersen, M. Olsen

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@article{91212a8074c911dbbee902004c4f4f50,

title = "High-fluence ion implantation of In into Al crystals : formation and evolution of buried layers",

author = "V.S. Touboltsev and G. Dybkj{\ae}r and A. Johansen and E. Johnson and Leif Sarholt-Kristensen and H.H. Andersen and M. Olsen",

note = "OEL",

year = "1998",

language = "English",

pages = "341--354",

journal = "Philosophical Magazine A",

number = "vol 77, no 2",

}

TY - JOUR

T1 - High-fluence ion implantation of In into Al crystals : formation and evolution of buried layers

AU - Touboltsev, V.S.

AU - Dybkjær, G.

AU - Johansen, A.

AU - Johnson, E.

AU - Sarholt-Kristensen, Leif

AU - Andersen, H.H.

AU - Olsen, M.

N1 - OEL

PY - 1998

Y1 - 1998

M3 - Journal article

SP - 341

EP - 354

JO - Philosophical Magazine A

JF - Philosophical Magazine A

IS - vol 77, no 2

ER -