Cluster size and velocity dependences of sputtering and secondary ion emission under gold cluster impact

N. Wehbe; M. Fallavier; S. Della Negra; J. Depauw; A. Brunelle; Hans Henrik Andersen

doi:10.1016/j.nimb.2010.05.105

Cluster size and velocity dependences of sputtering and secondary ion emission under gold cluster impact

N. Wehbe, M. Fallavier, S. Della Negra, J. Depauw, A. Brunelle, Hans Henrik Andersen

5 Citations (Scopus)

Abstract

Sputtering and ion emission rates have been measured from CsI and gold targets under the impact of Aun+ (n = 1-9) clusters at energies between 30 and 350 keV/atom. The two materials have similar behaviors in regard to the variations of the sputtering and anion emission yields with energy and cluster size. The sputtering and anion emission yields increase nonlinearly with the projectile size. The maximum anion yields are found at lower energies than the maximum sputtering yields which themselves occur substantially below the maximum energy losses. The variations with energy of the atomic ion yields differ from those of the cluster ion yields. The experimental results are in agreement with an ion emission from linear collision cascades and spike collisions, the relative contribution of these two processes depending on the size of the cluster projectile and of the emitted ion. In addition they show that the ion emission yield enhancements under cluster impact result from a more effective sputtering mechanism and not from an enhanced ionization of the ejected species.

Original language	English
Journal	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volume	268
Issue number	17-18
Pages (from-to)	2596-2602
Number of pages	6
ISSN	0168-583X
DOIs	https://doi.org/10.1016/j.nimb.2010.05.105
Publication status	Published - 1 Sept 2010

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Wehbe, N., Fallavier, M., Della Negra, S., Depauw, J., Brunelle, A., & Andersen, H. H. (2010). Cluster size and velocity dependences of sputtering and secondary ion emission under gold cluster impact. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 268(17-18), 2596-2602. https://doi.org/10.1016/j.nimb.2010.05.105

Cluster size and velocity dependences of sputtering and secondary ion emission under gold cluster impact. / Wehbe, N.; Fallavier, M.; Della Negra, S. et al.

In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 268, No. 17-18, 01.09.2010, p. 2596-2602.

Research output: Contribution to journal › Journal article › Research › peer-review

Wehbe, N, Fallavier, M, Della Negra, S, Depauw, J, Brunelle, A & Andersen, HH 2010, 'Cluster size and velocity dependences of sputtering and secondary ion emission under gold cluster impact', Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, vol. 268, no. 17-18, pp. 2596-2602. https://doi.org/10.1016/j.nimb.2010.05.105

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abstract = "Sputtering and ion emission rates have been measured from CsI and gold targets under the impact of Aun+ (n = 1-9) clusters at energies between 30 and 350 keV/atom. The two materials have similar behaviors in regard to the variations of the sputtering and anion emission yields with energy and cluster size. The sputtering and anion emission yields increase nonlinearly with the projectile size. The maximum anion yields are found at lower energies than the maximum sputtering yields which themselves occur substantially below the maximum energy losses. The variations with energy of the atomic ion yields differ from those of the cluster ion yields. The experimental results are in agreement with an ion emission from linear collision cascades and spike collisions, the relative contribution of these two processes depending on the size of the cluster projectile and of the emitted ion. In addition they show that the ion emission yield enhancements under cluster impact result from a more effective sputtering mechanism and not from an enhanced ionization of the ejected species.",

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T1 - Cluster size and velocity dependences of sputtering and secondary ion emission under gold cluster impact

AU - Wehbe, N.

AU - Fallavier, M.

AU - Della Negra, S.

AU - Depauw, J.

AU - Brunelle, A.

AU - Andersen, Hans Henrik

PY - 2010/9/1

Y1 - 2010/9/1

N2 - Sputtering and ion emission rates have been measured from CsI and gold targets under the impact of Aun+ (n = 1-9) clusters at energies between 30 and 350 keV/atom. The two materials have similar behaviors in regard to the variations of the sputtering and anion emission yields with energy and cluster size. The sputtering and anion emission yields increase nonlinearly with the projectile size. The maximum anion yields are found at lower energies than the maximum sputtering yields which themselves occur substantially below the maximum energy losses. The variations with energy of the atomic ion yields differ from those of the cluster ion yields. The experimental results are in agreement with an ion emission from linear collision cascades and spike collisions, the relative contribution of these two processes depending on the size of the cluster projectile and of the emitted ion. In addition they show that the ion emission yield enhancements under cluster impact result from a more effective sputtering mechanism and not from an enhanced ionization of the ejected species.

AB - Sputtering and ion emission rates have been measured from CsI and gold targets under the impact of Aun+ (n = 1-9) clusters at energies between 30 and 350 keV/atom. The two materials have similar behaviors in regard to the variations of the sputtering and anion emission yields with energy and cluster size. The sputtering and anion emission yields increase nonlinearly with the projectile size. The maximum anion yields are found at lower energies than the maximum sputtering yields which themselves occur substantially below the maximum energy losses. The variations with energy of the atomic ion yields differ from those of the cluster ion yields. The experimental results are in agreement with an ion emission from linear collision cascades and spike collisions, the relative contribution of these two processes depending on the size of the cluster projectile and of the emitted ion. In addition they show that the ion emission yield enhancements under cluster impact result from a more effective sputtering mechanism and not from an enhanced ionization of the ejected species.

U2 - 10.1016/j.nimb.2010.05.105

DO - 10.1016/j.nimb.2010.05.105

M3 - Journal article

SN - 0168-583X

VL - 268

SP - 2596

EP - 2602

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

IS - 17-18

ER -

Cluster size and velocity dependences of sputtering and secondary ion emission under gold cluster impact

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