Nanoscale patterning of electronic devices at the amorphous LaAlO3/SrTiO3 oxide interface using an electron sensitive polymer mask

Anders V. Bjorlig; Merlin von Soosten; Ricci Erlandsen; Rasmus Tindal Dahm; Yu Zhang; Yulin Gan; Yunzhong Chen; Nini Pryds; Thomas S. Jespersen

doi:10.1063/1.5026362

Nanoscale patterning of electronic devices at the amorphous LaAlO3/SrTiO3 oxide interface using an electron sensitive polymer mask

Anders V. Bjorlig, Merlin von Soosten, Ricci Erlandsen, Rasmus Tindal Dahm, Yu Zhang, Yulin Gan, Yunzhong Chen, Nini Pryds, Thomas S. Jespersen

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5 Citationer (Scopus)

Originalsprog	Engelsk
Artikelnummer	171606
Tidsskrift	Applied Physics Letters
Vol/bind	112
Udgave nummer	17
ISSN	0003-6951
DOI	https://doi.org/10.1063/1.5026362
Status	Udgivet - 23 apr. 2018

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10.1063/1.5026362Licens: CC BY

1.5026362Forlagets udgivne version, 1,73 MB
1.5026362Forlagets udgivne version, 1,92 MBLicens: CC BY

Citationsformater

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title = "Nanoscale patterning of electronic devices at the amorphous LaAlO3/SrTiO3 oxide interface using an electron sensitive polymer mask",

author = "Bjorlig, {Anders V.} and {von Soosten}, Merlin and Ricci Erlandsen and Dahm, {Rasmus Tindal} and Yu Zhang and Yulin Gan and Yunzhong Chen and Nini Pryds and Jespersen, {Thomas S.}",

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AU - Bjorlig, Anders V.

AU - von Soosten, Merlin

AU - Erlandsen, Ricci

AU - Dahm, Rasmus Tindal

AU - Zhang, Yu

AU - Gan, Yulin

AU - Chen, Yunzhong

AU - Pryds, Nini

AU - Jespersen, Thomas S.

N1 - [Qdev]

PY - 2018/4/23

Y1 - 2018/4/23

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M3 - Journal article

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VL - 112

JO - Applied Physics Letters

JF - Applied Physics Letters

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ER -

Nanoscale patterning of electronic devices at the amorphous LaAlO3/SrTiO3 oxide interface using an electron sensitive polymer mask

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